新世代奈米溶液監測系統

A Novel Monitoring System for Nano Solutions
SuperSizerⓇ是唯一可以量測液體溶液裡20奈米以下的粒子和雜質的量測設備。
SuperSizerⓇ的核心技術是使用氣膠量測,可以檢測3到64奈米粒子大小及數量分布,並且不受氣泡的影響,因此量測結果具有高準確度和可信度,不僅可協助半導體製造商及供應鏈改善先進製程的良率,也可共同促進半導體產業的長遠發展。
SuperSizerⓇ is a revolutionary nanoparticle sizing system. The core technology lies in Aerosol measurement. It measures sizes and populations of nanoparticles ranging form 3nm to 64nm and is free from interference of nanobubbles. The measurement results are highly accurate and reliable. It helps to improve the yield rates of advanced semiconductor manufacturing processes. SuperSizerⓇ is the only measurement tool on the market that can detect particle sizes smaller than 20 nm and their density.